This suggests that the model can accurately predict the response of a piezoelectric stack actuator and is promising for hysteresis compensation in nanopositioning applications. Aldrich, chad blodget, xioaqi bao, mircea badescu, yoseph barcohen. However, the piezo stack actuator can often produce much bigger output forces than required for some applications. Aluminum nitride piezoelectric micromachined ultrasound transducer arrays stefon shelton 1, andre guedes, richard przybyla 2, reut krigel 2, bernhard boser, david a.
The fundamental component of a piezoelectric stack actuator is a wafer of piezoelectric material sandwiched between two electrodes. Power harvesting prediction of piezoelectric stack actuator. The application of preload has also found to improve the strain output of piezoelectric stack actuators mitrovic et al. Frontiers preloading piezoelectric stack actuators in high. The piezoelectric actuators developed by cedrat technologies have the following outstanding characteristics. In formulating this model, the authors propose a generalized maxwell resistive capacitor as a lumpedparameter causal. The piezoelectric effect is a reversible electromechanical mechanism. The higher the capacitance, the slower the dimensional change of the actuator. The bouc wen model is introduced and analyzed to express the. Noliac offers high quality piezoelectric components as monolayer or multilayer products with market leading performance, reliability and dimensions. Piezoelectric actuator design and application on active. Due to unique properties piezoelectric actuation extends the portfolio of established actuator principles with regard to important features.
For this purpose, multilayer piezoelectric stacks are being considered as actuators for driving these precision mechanisms. Design and fabrication of a piezoelectric stack actuator for. They are internally preloaded by a mechanical spring and feature high resonant frequencies, making them ideal for high load, dynamic nanopositioning applications. Multilayer piezoelectric stack actuator characterization stewart sherrit, christopher m. Tube actuators are monolithic devices that contract laterally and longitudinally when a voltage is applied between the inner and outer electrodes. Controlling helicopter rotor blades using active flaps has been investigated for some time without being put into production. Pdf multilayer piezoelectric stack actuator characterization. Piezoelectric stack an overview sciencedirect topics. Plate stacks noliac your piezo partner piezoelectric.
The nominal quasistatic behavior of a piezoelectric stack actuator is a steadystate output displacement that is. This thesis studies a dynamic model of a moving stage driven by piezoelectric stack actuator. Uhvcompatible to 109 hpa, no outgassing, high bakeout temperature. Piezoelectric stack pzt stack has been widely used in many fields, such as active vibration control, precision positioning system and even mems, but the piezoelectric materiel has only very small induced displacement, which is about. Rotor using piezoelectric stack actuators 47 suppression in structures. Modeling and design of a prestressed piezoelectric stack. Control of an experimental piezoelectric actuators system materials. The microvalve described in this section has a silicon membrane called the upperboss, for isolating the piezoelectric actuator from the liquid effluent. An fem model of the actuator has been implemented starting from experimental characterization of the stack and mechanical and piezoelectric parameters. Picma stack multilayer piezo actuator, round cross section, 70 m travel range, od 16 mm.
Pdf modeling and control of piezoelectric stack actuators with. Wo2015174651a1 stack type actuator or sensor using. Patented picma stack multilayer piezo actuators with high reliability. Pi ceramic has suitable tips with standard dimensions in stock and mounts them prior to delivery. The fundamental component of piezoelectric stack actuator is a thin layer of piezoelectric material sandwiched by two electrodes. Stack actuators piezo stack actuator background info. To provide a method for designing a prestressed psa with highperformance, it is very meaningful to model the dynamic characteristics of the prestressed psa accurately.
Mar 22, 2010 a power driver has been developed to control piezoelectric stack actuators used in automotive application. Development of memsbased piezoelectric microvalve technologies. In the proposed model, various stack assembly arrangements have been assumed. The direct piezo effect, employed for instance in piezoelectric force sensors, represents generating an electric charge as an effect of mechanical strain. Modeling and control of piezoelectric stack actuators with hysteresis. Model and design of a power driver for piezoelectric stack. The response of five commercial piezoelectric stack actuators under electrical, mechanical, and combined electromechanical loading was investigated in this study. A new preload mechanism for a highspeed piezoelectric. The results demonstrate the existence of the hysteresis phenomenon between the input voltage and the output displacement of the piezoelectric stack actuator, and validate the correctness of the model. Pdf energy harvesting of piezoelectric stack actuator from. The present invention relates to a transparent stack type actuator using a pvdfbased polymer and a graphene electrode. This paper presents a computerbased tracking control approach for a piezoelectric actuator based on incorporating a feedforward loop with a pid feedback controller. Subnanometer runout introduction advantages of piezoelectric positioning systems applications for piezo actuators glossary units and. Piezoelectric pz actuator is widely recognized for its high precision and displacement accuracy even at nanometer ranges.
The piezoelectric effect is understood as the linear electromechanical interaction between the mechanical and the electrical state in certain crystalline. Technical simplicity, ease of integrating with the structure and reasonable cost make pzt stacks very attractive compared to other types of actuator, such as the magnetic bearings. A cylindrical stack actuator consistsof n identical piezoelectric thindiscs withad. The length of the voltageinduced extension is a function of the amplitude of the applied voltage driving the actuator and the length of the piezoelectric stack.
Piezoelectric stack actuators have been used in many high speed nanopositioners 17 and precision systems 811 due to their highbandwidth and large pushing force capabilities. The microdisplacement actuators that take advantage of counter. Piezoelectric actuator an overview sciencedirect topics. The piezoelectric actuator drive pad is a type of rotary motor that transforms the linear motion of piezoelectric stack actuators into a precise rotational motion. Piezo stack actuator, stack piezo actuator manufacturer. The alignment system installs a piezoelectric actuator with a hole in the. Piezo actuators piezotechnics piezo stack actuators. Pdf piezoelectric actuators are popularly applied as actuators in high precision systems due to their small displacement resolution, fast. This thesis presents the design of a piezoelectric ceramic stack actuator for use with needlefree jet injection nfji devices. Piezoelectric actuators developed by cedrat technologies. Piezo ceramic actuators, positioners and transducers. Behavioral implications of piezoelectric stack actuators for. Piezoelectric stack actuator and model figure 2 shows the typical structure of a piezoelectric stack actuator. A special epoxy sealing guarantees the most flexible, longest lifetime protection available on the market.
Quick changes in the applied voltage result in fast dimensional changes to the piezoelectric stack. Piezoelectric stack actuator parameter extraction with. Piezo stack actuators are equipped with a highly reliable, multilayer, lowvoltage, piezoelectric transducer stack. A new preload mechanism for a highspeed piezoelectric stack. We also offer piezoelectric materials and design of plugandplay piezobased solutions as sensors, transducers, drivers or motors based on our knowledge and experiences in the field.
Pdf modeling and control of piezoelectric stack actuators. Piezo stack actuator stacked piezo actuator can be customized according to your mounting platform design and fabrication. Control of the dynamic behavior of structures can be obtained using modal control tech. Piezoelectric selfsensing actuator for active vibration.
Stack actuators we offer both discrete stack and cofired stack actuators. Piezoelectric actuators piezo actuator, piezo transducers. Picma piezo stacks are extremely reliable and survived 100 billion cycles of lifetesting and harsh environments in space and on the mars rover with no failures. Piezoelectric actuators transducers are precision ceramic actuators which convert electrical energy directly into linear motion with high speed, force and virtually unlimited resolution. Preloading piezoelectric stack actuators is important to protect them from tensile loads during highspeed operations. While nfji devices have been in use for over 60 years only recently have they been electronically actuated which allows for precise control of jet velocity, penetration depth, and injection volume. Modal active vibration control of a rotor using piezoelectric. Pdf modeling piezoelectric stack actuators for control of. Proceedings of the asme 20 international design engineering technical conferences and computers and information in engineering conference. Introduction to piezoelectric actuators smashing robotics. Figure 1a shows the schematic of a stack actuator with the arrangement of electrodes and piezo stacks, and. A minimalistic model is proposed in the present work, for pz stack actuators.
Piezoelectric stack or multilayer actuators are manufactured by stacking up piezoelectric disks or plates, the axis of the stack being the axis of linear motion that occurs when a voltage is applied. The structure of a piezoelectric stack actuator is shown in. Aug 01, 2012 a piezoelectric actuator is an electrically controlled positioning element that functions based on the piezoelectric effect. The stack can be considered to comprise hundreds of individual piezoelectric layers separated by thin electrodes. Energy harvesting of piezoelectric stack actuator from a shock event article pdf available in journal of vibration and acoustics 61. The purpose of this paper is to improve the hysteresis characteristics of a stack type piezoelectric actuator using the hysteresis nonlinearity compensator. Piezo stack actuator piezo, piezoelectric manufacturer. In this example, the model is a twolayer cantilever beam, with both layers made of the same polyvinylidene fluoride pvdf material. A, ctuator has been developed to describe actuator behavior for purposes of control system analysis. The p212 and p216 series are highresolution linear piezo actuators translators for static and dynamic applications. Prior to fabrication, the wafer is polarized uniaxially along its thickness, and thus exhibits significant piezoelectric effect in. Modeling piezoelectric stack actuators for control of. A nonlinear lumpedparameter model of a piezoelectric stack actuator has been developed to describe actuator behavior for purposes of control system analysis and design, and, in particular, for microrobotic applications requiring accurate position andor force control. Pica piezoelectric linear actuators in stacked design are very reliable and feature a large specific displacement.
A stack type actuator or piezo actuator from piezosystem jena is based on multilayer ceramics. Therefore, analysis of a piezoelectric part requires the solution of a set of coupled partial differential equations with deflections and electrical potential as dependent variables. Experimental results are reported to show a correct piezoelectric actuator driving method and the possibility to obtain a sensorless. Piezo stacks, flexures, tubes, benders, shear actuators. Highlights of piezo stack actuation piezo stack actuation is a solidstate technology, which enables high technology solutions.
Piezoelectric devices applications of piezoelectric actuator. Modified maxwell model for hysteresis compensation of. The application of a voltage to the stack generates an electrical field within the ceramic layers resulting in a mechanical strain of the stack. They provide submillisecond response and subnanometer resolution. Theory and applications of piezo actuators and pzt. Dynamic analytical solution of a piezoelectric stack utilized. Power harvesting prediction of piezoelectric stack actuator from a shock event. Theory and applications of piezo actuators and pzt nanopositioning systems design of pzt stack actuator design of simple lever amplifier data showing impact of active trajectory control on guiding precision.
The most commonly used technology is the amplified piezoelectric actuator. Piezoelectric actuators can also be made with nonmagnetic materials, which allows their use in mri machine. The focus was to understand the behavior of piezoelectric materials under the combined electromechanical loading scenario, and to determine fundamental properties important for. Piezoelectric chips and stacks our selection of piezo chips and stacks includes cofired chips, cofired stacks, and discrete stacks. The system proposed in this study prints by spraying the molten metal.
Chips and discrete stacks with throughholes, shear chips, stacks with attached strain gauges, and bimorph bending actuators are. Electromechanical characterization of piezoelectric stack. Pica thru feature an inner hole, for applying a pretension or as clear aperture in optical applications. This technique has been proven in the field for many years by our extensive experience. Piezo stack actuator is a linear motor based on electrically controllable deformation of a solid body. The complete guide by method and principle for the designers and engineers to achieve complex functions and exceptional performance levels, they must think outside the conventional engineering. They are internally preloaded by a mechanical spring and feature high resonant frequencies, making them ideal for high load, dynamic applications. Ansys piezoelectric stack actuator simcafe dashboard. A novel model, which considers both the electric side and the mechanical side of the psa as distributed systems, is put forward to describe the dynamics characteristics of the. Picma stack actuators with an inner hole are ideally suited for. Multilayer piezoelectric stack actuator characterization. Jun 27, 2014 tutorial name created using ansys version number learning goals.
In the late 1990s, the piezoelectric actuator was applied for the optical axis alignment of optical. Discrete stacking offers the widest range of ceramic materials, flexibility in the shape of the ceramic elements, and better control of heat generated during high frequency operation, but voltages of 500 v v usually are needed to operate these actuators. The present invention is characterized in that a single layer of a pvdfbased polymer film with a predetermined length has an overlaying electrode on one of the upper and lower surfaces thereof and is folded in zigzags several times to form multiple layers. Npa piezo stack actuators are equipped with a highly reliable, multilayer, lowvoltage, piezoelectric transducer stack.